Abstract—Two novel structures for high-Q MEMS tumble capacitors are presented. The proposed designs include full plate as well as the comb structured capacitors. They can be fabricated employing surface micromachining technology which is CMOS-compatible. The structures do not require the cantilever beams which introduce considerable series resistance to the capacitor and decrease the quality fa...

+ e − Emission " We would like to point out here that although the idea expressed in the above mentioned paper [1] that the bare surface of a hot strange star may be a strong source of e + e − pairs of luminosity L e ± ∼ 3 × 10 51 ergs s −1 for a duration of ∼ 10 s appears to be novel and exciting, it is, unfortunately unlikely to work because of several reasons. It is true that, it has already...

The governing equations which are considered in two-dimensional cylindrical fluid simulations argon discharge with parallel resonance antenna are the continuity equation, the momentum equation with drift-diffusion approximation, the energy balance equation for electrons, the wave equation for azimuthal induced electric field, and Poisson equation for electrostatic electric field [1]. The power ...

This paper describes the operation, design, implementation and performance of RF coupled resonator filters. It starts by considering discrete parallel inductor/capacitor resonators and then moves on to discuss the implementation of this style of filter at higher frequencies using short circuit co-axial resonators in place of the inductors. Introduction Shunt mounted resonators, comprising a dis...

RF-MEMS design is made difficult due to the lack of tools capable of simulating both MEMS devices and their surrounding circuits. Often MEMS components can have structures more than 100 times smaller than the surrounding circuit. This paper presents FDTD based techniques that can be used to simulate large structures containing finely detailed components. Particularly, a split-cell modeling tech...

polyimide (PI) as flexible interconnection layer between the W mass W house and movatile capacitor plate capacitor plates. The sensor structure and its basic operating A A principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of 0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis ...