We propose the use of evolutionary algorithms (EAs) (Holland, 1992) to deal with the attribute selection task of referring expression generation. Evolutionary algorithms operate over a population of individuals (possible solutions for a problem) that evolve according to selection rules and genetic operators. The fitness function is a metric that evaluates each of the possible solutions, ensurin...

To optimize nanoimprint lithography (NIL), it is essential to be able to characterize and control the NIL process in situ and in real time. Recently we have developed a real-time imprint monitoring by the scattering-of-light (RIMS) approach, which allows us to detect the degree of resist deformation and the duration of resist penetration by a mould during the imprint process in real time. In th...