A novel wireless and passive surface acoustic wave (SAW) based temperature-compensated vibration sensor utilizing a flexible Y-cut quartz cantilever beam with a relatively substantial proof mass and two one-port resonators is developed. One resonator acts as the sensing device adjacent to the clamped end for maximum strain sensitivity, and the other one is used as the reference located on clamp...

The implementation and performance of a surface acoustic wave (SAW)-based acceleration sensor is described. The sensor was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of a two-port SAW resonator deposited directly on the surface of the beam adjacent to the clamped end for maximum strain sensitivity and a SAW resonato...

Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW devices have proved particularly useful. However, these devices basically measure a thin-film viscosity, which is often not comparable to the macroscopic parameters probed by conventional viscometers...

This paper presents a review of micro- and nano-structure based oligonucleotide detection and quantification techniques. The characteristics of such devices make them very attractive for Point-of-Care or On-Site-Testing biosensing applications. Their small scale means that they can be robust and portable, their compatibility with modern CMOS electronics means that they can easily be incorporate...

The sensitivity of vibration-type sensors can be improved using a higher resonating frequency cantilever resonator. Resonance in such systems achieved self-excited oscillation, which overcomes the difficulty an external excitation viscous environments. To enhance resonators, several groups have proposed ways to increase natural first mode by changing geometry. However, further oscillation with ...

Abstract: In recent years, MEMS/NEMS (Micro-/Nano Electro Mechanical Systems) sensors have attracted tremendous interest among researchers due to their low cost, quick response time, as well as high sensitivity and selectivity. In this paper, an ultra sensitive acetone sensor based on carbon nanotube (CNT) structure is proposed. In this device, a carbon nanotube is anchored to a substrate in on...

Abstract A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around first lowest modes. The system consists of a mechanically bridge resonator and cantilever resonator. eigenvalue problem solved to identify right geometry for optimize their resonance freq...

This paper demonstrates the acoustic resonance of an Independent-Gate (IG) FinFET driven with internal dielectric transduction and sensed by piezoresistive modulation of the drain current through the transistor. An acoustic resonance at 37.1 GHz is obtained with a quality factor of 560, corresponding to an f.Q product of 2.1x10. The demonstrated hybrid NEMS-CMOS technology can provide RF CMOS c...