To date, materials selection in microfluidics has been restricted to conventional micromechanical materials systems such as silicon, glass, and various polymers. Metallic materials offer a number of potential advantages for microfluidic applications, including high fracture toughness, thermal stability, and solvent resistance. However, their exploitation in such applications has been limited. I...

This paper describes recent development on the design of the flight control system for a Micromechanical Flying Insect (&PI), a 10-25mm (wingtipto-wingtip) device capable of sustained autonomous flight. High level attitude control is considered. Based on our previous work [l], in which the complex time-varying component of aerodynamic forces are treated as extemal disturbances, a nominal state-...

The rapid layout synthesis of microresonators from high-level engineering specifications is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing a user-specified objective function. A synthesis tool implementing the optimization-based formulation can be used to explore micromechanica...

Fast colloidal motions driven by surface tension gradient are created in a thin water layer. Unlike using solid boundaries to limit the colloidal flow, our work relaxes this condition by directly placing bulk fluid next to an open air environment. When the colloidal flow along the air/water interface is interfered with stationary objects, repetitive semicircular motions, that is, micro eddy, ar...

The mechanical testing of micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) requires precise measurements of displacement and strain in the nanometer scale. Integrated testing devices, including specimens, actuators and sensors, were designed and fabricated to overcome the aligning and gripping difficulties faced by previous separated micromechanical testing app...

Suspended microchannel resonators SMRs are an innovative approach to fluid-based microelectromechanical mass sensing that circumvents complete immersion of the sensor. By embedding the fluidics within the device itself, vacuum-based operation of the resonator becomes possible. This enables frequency shift-based mass detection with high quality factors, and hence sensitivity comparable to vacuum...

We present a new method of tailoring the density of a sphere for use as a probe in high pressure-temperature physical property experiments on liquids. The method consists of a composite sphere made of an inner, high density, metallic, spherical core and an exterior, low density, refractory, spherical shell or mantle. Micromechanical techniques are used to fabricate the composite sphere. We desc...

The article describes design and realization of an airflow structure for measurement. There are structure and electronic circuits design in the paper are described The principle of a flowmeter sensor operation is based on the mechanism of a fluidic oscillator. It uses fluidic paths in feedback. Oscillator samples have been made using different technologies and materials. Micromechanical shaping...

A 550 kHz CMOS micromechanical bandpass filter, is designed using a parameterized cell library, "NODAS," for schematic representation and behavioral HDL simulation. The filter employs a unique resonator and coupling spring structure implemented in a CMOS-MEMS technology. As an alternative design method, an equivalent SPICE model is derived for the filter. Frequency response around the filter pa...

Constitutive law for shape-memory alloys subjected to multi-axial loading, which is based on a semi-micromechanical integrated multi-plane model capable of internal mechanism observations, is generally not available in the literature. The presented numerical results show significant variations in the mechanical response along the multi loading axes. These are attributed to changes in the marten...