We report a method to additively build threedimensional (3-D) microelectromechanical systems (MEMS) and electrical circuitry by ink-jet printing nanoparticle metal colloids. Fabricating metallic structures from nanoparticles avoids the extreme processing conditions required for standard lithographic fabrication and molten-metal-droplet deposition. Nanoparticles typically measure 1 to 100 nm in ...

Abbreviations MEMS Microelectromechanical systems NEMS Nano-electromechanical systems PCL Polycaprolactone PET Polyethylene terephthalate PGA Polyglycolic acid PLA Polylactic acid PU Polyurethane PTFE Poly(tetrafl uoroethylene) PMMA Polymethylmethacrylate UHMWPE Ultrahigh molecular weight polyethylene

The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surfacemicromachined resonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and d...

1 Group of Structural Mechanics and Materials Modelling (GEMM), Centro de Investigación Biomédica en Red en Bioingeniería, Biomateriales y Nanomedicina (CIBER-BBN), Zaragoza, Spain, 2 Aragón Institute of Engineering Research (I3A), University of Zaragoza, Zaragoza, Spain, 3 Aragon Institute of Biomedical Research, Instituto de Salud Carlos III, Zaragoza, Spain, 4 MEMS/MST Department, Ikerlan S....

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A novel MEMS thermopile structure is presented, which consist of linearly arranged pand ntype polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter ...