We have designed a micro parallel positioning platform with two translational motions and a rotational motion that can tilt through large angles. Combined with a laser source mounted on its own slide, the platform can be used to produce fully three-dimensional micro-scale components. We investigate the kinematics, workspace, Jacobian matrix, and singularities of this parallel mechanism, and ana...

With flexure-based micro-positioning stages (MPSs) being in high demand for high-precision applications, the performance and cost of MPSs are two issues that urgently need to be addressed. In addition, current developed toward complex spatial configurations, which further precludes monolithic fabrication. To address aforementioned issues, modular using designed standardized modules introduced t...

A high-precision and low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 × 25 × 10 mm3 and the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness and thermal accuracy, and the co-planar stage for less Abbe error. The linear diffra...

Probe-based data-storage devices are being considered as ultra-high-density, smallform-factor and low-power alternatives to conventional data storage. Ultra-high storage densities of up to 1 Tb/in or more can be achieved by using atomic force microscopy (AFM) techniques to write, read back, and erase data in very thin polymer films. High data rates are achieved by parallel operation of large ar...

In part I of this paper (previous issue of Robotica) a dual stage system with the coarse and fine actuators is adopted to achieve sub-micron accuracy with a large working space for the proposed new three degree-of-freedom (DOF) miniaturized micro parallel mechanism with high mobility and one type of the architecture with vertical actuator locations in all three legs (C-VV type) among six possib...

High precision control of micro- and nanoscale objects in aqueous media is an essential technology for nanoscience and engineering. Existing methods for particle trapping primarily depend on optical, magnetic, electrokinetic, and acoustic fields. In this work, we report a new hydrodynamic flow based approach that allows for fine-scale manipulation and positioning of single micro- and nanoscale ...

This study demonstrates the suitability of microfluidic structures for high throughput blood cell analysis. The microfluidic chips exploit fully integrated hydrodynamic focusing based on two different concepts: Two-stage cascade focusing and spin focusing (vortex) principle. The sample--A suspension of micro particles or blood cells--is injected into a sheath fluid streaming at a substantially ...