The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspend...

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry–Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic freque...

Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...

The mechanical behaviors of microstructures and micro-devices have drawn the attention from researchers on materials and mechanics in recent years. To understand the rule of these behaviors, the deformation measurement techniques with micro/nanometer sensitivity and spatial resolution are required. In this paper, a micro-marker identification method is developed to measure microstructure deform...

Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale, and function individually or in arrays to generate effects on the ma...

Electrodeposition is a very important technology in the fabrication of micro-compo‐ nents for micro-electro-mechanical systems (MEMS) or integrated circuits. Evalua‐ tions of the materials used in these devices as 3D components should be conducted using micro-sized specimens due to the sample size effect on the practical use of the components. Nanocrystalline metals could be deposited using an ...

The aim of this work is to develop a lowoverhead, low-cost built-in test for Micro Electro Mechanical Systems (MEMS). The proposed method relies on processing the Impulse Response (IR) through trained neural networks, in order to predict a set of MEMS performances, which are otherwise very expensive to measure using the conventional test approach. The use of neural networks allows us to employ ...

*Correspondence: Heung Soo Kim, Department of Mechanical, Robotics and Energy Engineering, Dongguk University, 30 Pil-Dong 1-ga, Jung-Gu, Seoul 100-715, South Korea e-mail: [email protected] Cellulose electro-active paper (EAPap) is an attractive material of electro-active polymers family due to its smart characteristics. EAPap is thin cellulose film coated with metal electrodes on both sides. I...

in this paper, an adaptive neuro fuzzy inference system (anfis) based control is proposed for the tracking of a micro-electro mechanical systems (mems) gyroscope sensor. the anfis is used to train parameters of the controller for tracking a desired trajectory. numerical simulations for a mems gyroscope are looked into to check the effectiveness of the anfis control scheme. it proves that the sy...