This article investigates how to adaptively predict the time-varying metrology delay that could realistically occur in the semiconductor manufacturing practice. Metrology delays pose a great challenge for the existing run-to-run (R2R) controllers, driving the process output significantly away from target if not adequately predicted. First, the expected asymptotic double exponentially weighted m...

C. Jassadajin , C. Kurupakorn , N. Khumthukthit , A. Pruksanubal *4 # Electrical Metrology Department, National Institute of Metrology (Thailand) 3/4-5 Moo 3, Klong 5, Klong Luang, Pathumthani 12120 THAILAND 1 [email protected] 2 [email protected] 3 [email protected] * Department of Electrical Engineering, King Mongkut’s University of Technology North Bangkok 1518 Phiboonsongkram Road, ...

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and spatial carrier interferometry. ©2004 Optical Society of America OCIS codes: (120.0120) Instrumentation, measurement and me...

Coordinate measuring systems (CMSs) assess length-based characteristics of mechanical parts by measuring points on the part surface and analyzing the point data. Data analysis software can contribute significantly to the total measurement error of a CMS. Factors affecting software performance include the choice of analysis method, the quality of the software, and characteristics of the specific...

Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards mini...

The plasma facing surfaces in ITER must be aligned to millimeter accuracy with respect to the magnetic flux surfaces to prevent impurity influx into the plasma and to avoid component damage. Checking of in-vessel component alignment during initial assembly, operation, and subsequent maintenance is anticipated. A fully remote metrology system is necessary, particularly since major remote operati...