This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

The exact solution of the movement equation Coriolis vibratory gyroscope (CVG) with a linear law variation angular rate rotation base is given. expressed in terms Weber functions (the parabolic cylinder functions) and their asymptotic representations. On basis obtained solution, an analytical to ring dynamics case piecewise approximation arbitrary velocity profile on time grid derived. compared...

This paper presents a vertical (Z-axis) CMOS-MEMS gyroscope with a measured noise floor of 0.03°/sec/ and 1% linearity in the range of -360° /sec to 360°/sec. The gyroscope is fully compatible with conventional CMOS processes, which enable the integration of most of the conditioning circuits. It is fabricated in a three-metal-layer 0.5μm CMOS process followed by a two-step dry etch release. An ...

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Exper...

This paper provides a comprehensive derivation for thermoelastic damping (TED) in flexural-mode ring gyroscopes, in light of recent efforts to design high rateresolution gyroscopes. Imposing an upper limit on the attainable mechanical noise floor of a vibratory gyroscope, thermoelastic damping in a ring gyroscope is extracted from the equations of linear thermoelasticity. By assuming that it is...

This paper studies a design approach that yields robust vibratory MEMS gyroscopes. The design is based on multiple drive-mode resonators with incrementally spaced frequencies, distributed symmetrically around the center of a supporting frame. These resonators are structurally constrained in the tangential direction with respect to the supporting frame. In the presence of an angular rotation rat...

Abstract The noise signal in the gyroscope is divided into four levels: sampling frequency level, device bandwidth resonant and carrier level. In this paper, dual-mass MEMS analyzed. Based on variational mode decomposition (VMD) algorithm, a novel reduction method proposed. VMD with different four-level center frequencies used to process original output of gyroscope, results are analyzed by All...

This paper represents a first step in developing an indoor navigation system based only on Micro-Electro-Mechanical Systems (MEMS) accelerometer and gyroscope sensors. The major advantage of the proposed inertial navigation system consists on the fact that it does not require any complex infrastructure to be able to operate. For determining the distance it uses three axis accelerometer sensors,...

In this paper, the CFD approach is used to simulate the thermal behavior in a sensitive high-Q gyroscope. The electromagnetically driving wires, in which the alternating current flows, are treated as Joule heat sources in the model. We found that the differences of the temperature, pressure and velocity along the driving direction and transversely across the proof masses increased as the gap he...