In this work, a sensor to evaluate sterilization processes with hydrogen peroxide vapor has been characterized. Experimental, analytical and numerical methods were applied to evaluate and study the sensor behavior. The sensor set-up is based on planar interdigitated electrodes. The interdigitated electrode structure consists of 614 electrode fingers spanning over a total sensing area of 20 mm²....

Interference-lithography and a self-aligning angle-evaporation technique are employed to fabricate interdigitated photoconductive terahertz (THz) emitters. The devices have a large active area for high directivity and submicron spaced electrodes for high internal electric fields at low bias voltages. The fabrication process offers the advantage that only one patterning step is needed to generat...

Interdigitated nanoelectrodes have a very large panel of applications running from organic devices (organic FETs) to biomolecule detection devices [1], or nano-electrochemistry. These nanoscale interdigitated electrodes turned out to be very efficient for electrically addressing small nanoobjects or for designing short conduction channels while conserving sufficient current density. In this pap...

This paper presents a passive LC wireless sensor for measuring temperature. The sensor is designed as a parallel connection of a spiral inductor and an interdigitated capacitor and it was fabricated in a conductive layer using LTCC (Low Temperature Co-fired Ceramic) technology. The inderdigitated capacitor electrodes were coated with a thin film of bismuth doped barium titanate (Ba0.9Bi0.066TiO...

Microbatteries are increasingly important for powering electronic systems, however, the volumetric energy density of microbatteries lags behind that of conventional format batteries. This paper reports a primary microbattery with energy density 45.5 mWh cm 2 mm 1 and peak power 5300 mW cm 2 mm 1, enabled by the integration of large volume fractions of high capacity anode and cathode chemistry i...

The in-plane dielectric and ferroelectric properties of preferentially oriented lead zirconate titanate (PZT) thin films are characterized using interdigitated transducers (IDTs). By combining finite element method simulations capacitance measurements, values the constant with thicknesses between 150 nm 800 obtained. A modified Sawyer–Tower circuit is used to investigate polarization loops meas...

The paper presents a new approach in the field of precise electrolytic conductivity measurements with planar thin- and thick-film electrodes. This novel measuring method was developed for measurement with comb-like electrodes called interdigitated electrodes (IDEs). Correction characteristics over a wide range of specific conductivities were determined from an interface impedance characterizati...

Direct stamping of functional materials has been developed for cost-effective and process-effective manufacturing of nano/micro patterns. However, there remain several challenging issues like the perfect removal of the residual layer and realization of high aspect ratio. We have demonstrated facile fabrication of flexible strain sensors that have microscale thick interdigitated capacitors with ...

The fabrication and spatial positioning of electrodes are becoming central issues in battery technology because of emerging needs for small scale power sources, including those embedded in flexible substrates and textiles. More generally, novel electrode positioning methods could enable the use of nanostructured electrodes and multidimensional architectures in new battery designs having improve...