The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

P-beam writing (proton beam writing) is a unique direct write 3D nano-lithographic technique which has been developed at the Centre for Ion Beam Applications (CIBA), in the Physics Department of the National University of Singapore. This technique employs a focused MeV proton beam which is scanned in a predetermined pattern over a resist (e.g. PMMA, SU-8 or HSQ), which is subsequently chemicall...

Among the intermolecular interactions, the Casimir and van der Waals forces are the most important forces that highly affect the behavior of nanostructures. This paper studies the effect of such forces on the adhesion of cantilever freestanding nanostructures. The nanostructures are made of a freestanding nano-beam which is suspended between two upper and lower conductive surfaces. The linear s...

A semi-analytical method is used to study the effects of the multi vibration absorbers on the nonlinear functionally graded (FG) Euler-Bernoulli beam subjected to periodic load. The material properties of the beam are assumed to be continuously graded in the thickness direction. The governing equations of functionally graded beam are obtained based on the Hamilton's principle and these equation...

Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the microand nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials us...

Abstract The size dependent static pull-in instability of functionally graded (FG) microbeams in micro-electromechanical systems (MEMS) is studied, considering the influence axial force. material properties are varied beam thickness by a power-law function, and they calculated rule mixture. To account for microsize effect, classical Euler-Bernoulli theory employed combination with modified coup...

We propose electron beam excitation assisted optical microscope, and demonstrated its resolution higher than 50 nm. In the microscope, a light source in a few nanometers size is excited by focused electron beam in a luminescent film. The microscope makes it possible to observe dynamic behavior of living biological specimens in various surroundings, such as air or liquids. Scan speed of the nano...

It is shown that the energy absorption of a rare-gas cluster from a vacuumultraviolet (VUV) pulse can be traced with time-delayed extreme-ultraviolet (XUV) attosecond probe pulses by measuring the kinetic energy of the electrons detached by the probe pulse. By means of this scheme we demonstrate, that for pump pulses as short as one femtosecond, the charging of the cluster proceeds during the f...