Due to their small size, low weight, low cost and low energy consumption, MEMS (Microelectromechanical Systems) devices have achieved great commercial success in recent decades. MEMS accelerometers have been widely used in automobile airbag deployment systems, inertial navigations, etc. In this paper, the design and simulation of a novel bulk-micromachined capacitive MEMS dual axis acceleromete...

Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the accelerometer, and copper was chosen as a head mass. Seedless and refresh hydrothermal synthesis met...

We examined the reliability of scores from physical activity monitors in a sample of 193 individuals with multiple sclerosis (MS) who wore a pedometer and an accelerometer for a 7-day period. There were no significant differences among days for the pedometer (p = .12) or the accelerometer (p = .15) indicating that week and weekend days can be analyzed in a single intra-class correlation (ICC) a...

In order to determine the value of accelerometry as a measure of real world outcome when a subject is outside the laboratory, accelerometer recordings from the wrist were compared with simultaneous electromyogram (EMG) recordings from the lower and upper arm. Accelerometer and EMG signals were recorded simultaneously by the “Kölner Vitaport System,” an ambulatory device. Six male subjects perfo...

We examine the feasibility of designing an accelerometer-based (or gyroscope-free) inertial navigation system that uses only accelerometers to compute the linear and angular motions of a rigid body. The accelerometer output equation is derived to relate the linear and angular motions of a rigid body relative to a fixed inertial frame. A sufficient condition is given to determine if a configurat...

The use of advanced embedded system technologies such as microelectromechanical system ~MEMS! sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance, planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superi...

Abstract: In this paper, a novel integrated high precision vacuum microelectronic accelerometer is put forward based on the theory of field emission, the accelerometer consists of sensitive structure and interface ASIC. The sensitive structure has a mass of a cathode cone tips array, a folded beam, an emitter electrode and a feedback electrode. The sensor is fabricated on a double side polished...

Low cost high precision MEMS accelerometers with near μg resolution and stability are needed in a number of applications ranging from GPS-augmented inertial navigation systems to guidance and stabilization of satellites and spacecrafts [1]. This paper presents a truly 14b Σ∆ modulator interface IC for a highresolution SOI capacitive accelerometer fabricated in a simple stictionless process that...

In this paper, a novel GPS (Global Positioning System) and DR (Dead Reckoning) system which was based on the accelerometer and gyroscope integrated system was designed and implemented. In this system, the odometer used in traditional DR system was replaced by a MEMS tri-axis accelerometer in order to decrease the cost and the volume of the system. The system was integrated by the Kalman filter ...