MEMS are regarded to be an enabling technology allowing the development of smart products by augmenting the computational ability of microelectronics with the perception and control capabilities of micro-sensors and micro-actuators. MEMS technology makes possible the integration of microelectronics with active perception and control functions, thereby, greatly expanding the design and applicati...

This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or s...

Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (MicroElectro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEM...

This paper introduces our recent activities in R&D Center of Excellence for Integrated Microsystems toward new integrated MEMS. The most prominent difference of the new integrated MEMS from conventional ones is that MEMS is fabricated on advanced LSI with a very small design rule. Two examples of integrated MEMS technologies under development are described. The first one is singlecrystal-silico...

Micro-electro-mechanical systems (MEMS) are very small devices that contain both mechanical and electrical elements with sizes in the order of microns. Design cycle time is an important consideration in the development and introduction of MEMS devices in the market. To develop extraction tools for MEMS designs, we need geometric algorithms to analyze the spatial layout of the mechanical portion...

Due to its desirable material properties, Silicon Carbide (SiC) has become an alternative material to replace Si for Microelectromechanical Systems (MEMS) applications in harsh environments. To promote SiC MEMS development towards future cost-effective products, main technology areas in material deposition and processes have attracted significant interest. The developments in these areas have c...

This paper presents the design of a V-band switched-line phase shifter using SP4T RF-MEMS switches. Sonnet simulations are used to achieve accurate circuit models of both the RF-MEMS switches as well as CPW bends within the phase shifter. The V-band phase shifter utilizes two SP4T RF-MEMS switches to perform the delay line switching. The RF performance of the SP4T MEMS switch is optimized to ad...

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

MEMS-based storage is one of the leading candidates as tomorrow’s storage medium due to its salient characteristics such as high-parallelism, high density, and low-power consumption. Because physical structures of MEMS-based storage is different from those of hard disks, new software management techniques for MEMS-based storage are needed. Specifically, MEMS-based storage has thousands of paral...