The study of surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and each has its own applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology. Strengths and weaknesse...

There is considered some methods of metrology testing of intelligent measurement systems. Also there is shown the necessity of simulation of components of measurement channel for investigation of the intelligent functions of the intelligent measurement systems in the accelerated time scale. Developed the metrology software test of temperature measurement channel using thermocouple. The results ...

Metrology dedicated to electricity and magnetism has changed considerably in recent years. It encompasses almost all modern scientific, industrial, and societal challenges, e.g. the revision of the International System of Units, the profound transformation of industry, changes in energy use and generation, health, and environment, as well as nanotechnologies (including graphene and 2D materials...

A 300 amu closed-ion-source RGA (Leybold-Inficon Transpector 2) sampling gases directly from the reactor of an ULVAC ERA-1000 cluster tool has been used for real time process monitoring of a W CVD process. The process involves H2 reduction of WF6 at a total pressure of 67 Pa (0.5 torr) to produce W films on Si wafers heated at temperatures around 350° C. The normalized RGA signals for the H2 re...

a r t i c l e i n f o Keywords: Dimensional metrology Interoperability Standard development STEP DMIS Dimensional metrology is an important part of any manufacturing system. It consists of distinct components and requires a large, diverse, and interconnected knowledge base. How to pass information seamlessly with minimal cost and minimal data loss between different components of a dimensional m...

This chapter focuses on metrology, sensors and controls for micromanufacturing. In general, a variety of sensors are employed in micromanufacturing. Many of them are used for metrology, and in particular dimensional metrology. Most are used on production machines to provide feedback during production. Few metrology systems for process and product control are available. The sensors and metrology...