One of the key requirements for MEMS speakers is to increase sound pressure level (SPL) while keeping size as small possible. In this paper we present a speaker based on piezoelectric bimorph cantilevers that produces higher SPL than conventional unimorph cantilever speakers. The active diaphragm 1.4 × mm2. are connected in parallel make full use actuation voltage. At 1 kHz, measured reached 73...

This paper presents a new architecture in soft robotics that utilizes particulate jamming technology. A novel concept of actuation is described that utilizes jamming technology to modulate the direction and magnitude of the work performed by a single central actuator. Jamming “activators” modulate work by jamming and unjamming (solidifying and liquifying) a granular medium coupled to a core act...

In this paper, a four-bar mechanism with two flexible links is proposed to be used in a micromechanical flying insect robot wing thorax design for stroke amplification. PZT5H and PZN-PT based unimorph actuators are utilized at the input link of the four-bar. The kinematics and dynamics of the proposed wing strcuture with two parallel four-bar mechanisms are analyzed, and DC forces generated at ...

An in-package voltage-sensing integrated magnetometer for low frequency neural recording at room temperature is presented. The detection system consists of a voltage mode CMOS amplifier with an active biasing circuit and a Metglas/Polyvinylidene fluoride (PVDF)-based magnetoelectric (ME) unimorph sensor measuring 10 × 3 × 0.025 mm in volume, representing the smallest ME sensor volume reported t...

Chip scale, high sensitivity magnetic sensor arrays capable of sensing below 100 picoTesla vector fields are of great interest to biomedical applications such as noninvasive medical imaging and diagnosis. Here, we present an integrated magnetoelectric resonant gate transistor (ME RGT) with nanoTesla magnetic field detection sensitivity. The device integrates Titanium (Ti)-Metglas (Fe0.85B0.05Si...