Solid state dewetting of ultrathin films is the most straightforward means of fabricating substrate-supported noble metal nanostructures. This assembly process is, however, quite inflexible, yielding either densely packed smaller structures or widely spaced larger structures. Here, we demonstrate the utility of introducing a sacrificial antimony layer between the substrate and noble metal overl...

Wafer-scale fabrication of complex nanofluidic systems with integrated electronics is essential to realizing ubiquitous, compact, reliable, high-sensitivity and low-cost biomolecular sensors. Here we report a scalable fabrication strategy capable of producing nanofluidic chips with complex designs and down to single-digit nanometre dimensions over 200 mm wafer scale. Compatible with semiconduct...

SUMMARY Etching of sacrificial material is widely used in surface micromachining technology to form integrated micro mechanical structures. The process typically consists of three steps: the removal of sacrificial-layer material using liquid chemicals, rinsing, and removal of the rinse liquid (drying). The last step is known to cause surface sticking and drastic reduction of device yield. This ...

−This paper presents the design, fabrication and characterization of a 32 by 32 electroplated micromirror array on a glass, a low cost substrate. Approaches taken in this work for the fabrication of micromachined mirror arrays include a line addressing scheme, a seamless array design for high fill factor, planarization techniques of polymeric interlayers, a high yield methodology for the remova...

0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2010.12.107 ⇑ Corresponding author. E-mail address: [email protected] (J We fabricated molds consisting of features in rigid UV-cured resist on an elastic poly(dimethylsiloxane) (PDMS) support for hybrid nanoimprint-soft lithography. The molds were duplicated through coating and curing a UV-curable resist onto a pol...

This paper reports the design, fabrication and testing of a free-standing encastre beam resonator which is entirely fabricated using screen printing onto a flexible polyimide substrate. The design of the free-standing resonator was achieved using sacrificial techniques. The resonator was designed to be excited at one end of the beam and the vibrations detected on the other end using piezoelectr...

This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or ...

Polymeric multilayer capsules have emerged as a novel drug delivery platform. These capsules are fabricated through layer-by-layer sequential deposition of polymers onto a sacrificial core template followed by the decomposition of this core yielding hollow capsules. The resulting nanometer thin membrane is permselective, allowing diffusion of water and ions but excluding larger molecules. Moreo...

This article describes the use of a case-based reasoning approach on spatial organization of farms and their management. Spatial organization graphs (sog) model observed data. They can be recorded within a computer device and automatically compared. Functioning explanations are associated to sog and are organized within a case base. Thus, according to graph similarity, explanations can be propo...