Two-side surface photovoltage TS-SPV based on measuring SPV from both wafer sides is proposed as the approach for silicon iron contamination monitoring. TS-SPV is applied to follow diffusion of implanted iron in a lightly doped p-type silicon during rapid thermal anneal RTA . Good correlation is found between the iron distribution versus RTA conditions in the range of 375–1100 °C. The impact of...

introduction: tracking temporal changes of temperature during laser skin treatment plays an important role in improving the process of laser skin treatment itself. there are a number of methods to analyze temperature’s temporal dependency during laser skin treatment; some of those methods depend on imaging the skin with thermal cameras. however, the use of thermal cameras exhibits specific prob...

This study focuses on the optimal control of rapid thermal annealing (RTA) used in the formation of ultrashallow junctions needed in next-generation microelectronic devices. Comparison of different parameterizations of the optimal trajectories shows that linear profiles give the best combination of minimizing junction depth and sheet resistance. Worst-case robustness analysis of the optimal con...

The possibility of using sendust (FeAlSi) as the soft magnetic underlayer for hexagonal barium ferrite (BaM) and strontium ferrite (SrM) was studied. Sendust films were found to retain their soft magnetic properties with a rapid thermal anneal (RTA) at 800 C for 60 s, which is necessary to crystallize the as-deposited amorphous BaM and SrM films. Several film structures with sendust films as th...

The radiative properties of patterned silicon wafers have a major impact on the two critical issues in rapid thermal processing (RTP), namely wafer temperature uniformity and wafer temperature measurement. The surface topography variation of the die area caused by patterning and the roughness of the wafer backside can have a significant effect on the radiative properties, but these effects are ...

In this paper, the memory characteristics of two kinds of metal-oxide-semiconductor (MOS) capacitors embedded with Au nanocrytals are investigated: hybrid MOS with nanocrystals (NCs) fabricated by chemical syntheses and rapid thermal annealing (RTA) MOS with NCs fabricated by RTA. For both kinds of devices, the capacitance versus voltage (C–V ) curves clearly indicate the charge storage in the ...

Endopores (or spores), which are produced by certain bacteria, are capable of surviving food processing and causing food spoilage and foodborne illness. Dipicolinic acid (DPA), which constitutes about 10% of the spores’ dry weight, plays a major role on wet heat resistance of spores. Current methods like chromatography and fluorometry that are used to quantify DPA are time-consuming, expensive ...

Use of high ramp rates ~.400°C/s! in rapid thermal annealing after ion implantation leads to experimentally observed improvements in junction depth and the reverse narrow-channel effect. However, a straightforward explanation for this effect has been lacking. Via modeling, we find that increasing the heating rate permits clusters with dissociation energies lower than the maximum of 3.5-3.7 eV t...

We report the application of the technique of infrared transmission to measure the temperature of silicon wafers during the growth of silicon-germanium alloy heteroepitaxial layers in a rapid thermal processing system. The silicon-germanium alloy layers have negligible absorption at 1.3 and 1.55 pm over wide ranges of thickness, composition, and strain condition. The substantial improvement of ...

The nanocomposite magnet, which is composed of exchange coupled nanocrystalline soft (Fe3B, α-Fe) and hard (Nd2Fe14B) magnetic phases, was first reported by Coehoorn et al. [1], and the theoretical basis of it was reported by Kneller and Hawig [2]. Nd-Fe-B based nanocomposite magnet has attracted considerable research interest due to its excellent magnetic properties with relatively low amount ...