This paper is focused on the stability of nchannel laser-crystallized polysilicon thin-fi lm transistors (TFTs) submitted to a hydrogenation process during the fabrication and with small grains dimension.With the aid of numerical simulations, we investigate the effects of static stress using two types of procedures: the on stress and the hot carrier stress. Results show that the variations of t...

A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro-structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430x130x15 µm 3 nickel-iron plate attached to a pair of 400x2.2x2.2 µm 3 polysilicon ...

Low-frequency noise is studied in N-channel polysilicon TFTs issued from two (low temperature ≤600°C) technologies: furnace solid phase crystallized (FSPC) and laser solid phase crystallized (LSPC) TFTs. The distribution of the trap states (DOS) into the polysilicon bandgap determined for devices biased in the weak inversion is one decade lower for LSPC devices. The high range values (10≤α≤1) o...

Degradation phenomena due to hot carrier stress conditions were investigated in double-gate polysilicon thin film transistors fabricated by sequential lateral solidification (SLS). We varied the hot carrier stress conditions at the front gate channel by applying various voltages at the back-gate. Thus, we investigated the device electrical performance under such stress regimes. As a conclusion,...

Interdigitated finger (comb) structures are demonstrated to be effective for exciting electrostatically the resonance of polysilicon microstructures parallel to the plane of the substrate. Linear plates suspended by a folded-cantilever truss and torsional plates suspended by spiral and serpentine springs are fabricated from a 2/~m-thick phosphorus-doped low-pressure chemical-vapordeposited (LPC...

RH sensors have been made using porous polysilicon and porous SiC, both of which can also be made porous by electrochemical anodisation in HF, similarly to single crystal silicon. We show that polysilicon can be incorporated into a humidity sensor enabling a reduction (compared to single-crystal porous Si) of the effect of temperature on humidity measurements. We show that also porous SiC can a...

SLS ELA polysilicon TFTs fabricated in films crystallized with several novel techniques, yielding different film microstructure and texture, were investigated. The parameter statistics indicate that the TFT performance depends on film quality and asperities, in conjunction with the grain boundary trap density. The drain current transients, upon TFT switch from OFF to ON state, showed gate oxide...

We describe polysilicon micromotors with diffraction gratings fabricated on the polished surface of the polysilicon rotor for optical switching applications. The motors have rotor diameters of 0.5–2 mm with grating elements having periods of 1.80 and 3.86 mm. These microswitches have rise times of 300 ms and settling times of 500 ms when driven by a 65-V switching pulse. The diffractive nature ...