This paper presents a unique optical technique that utilizes the reabsorption and emission of two fluorescent dyes to accurately measure film thickness while minimizing errors caused by variations in illumination intensity and surface reflectivity. Combinations of dyes are selected that exhibit a high degree of emission reabsorption and each dye concentration is adjusted to create an optically ...

The ellipsometric film thickness measurement precision for equivalent oxide thickness as prescribed by the International Technology Roadmap for Semiconductors is quite high. Although short-term precision on a single ellipsometric instrument can be quite high, deviations of measured film thickness from instrument-to-instrument and from lab-to-lab for short-term and long-term periods of time need...

polyvinyl butyral (pvb) was synthesized by condensation reaction of polyvinyl alcohol (pva) with butanal in aqueous medium containing an effective emulsifier and an inorganic acid as catalyst. the product was characterized by, ir, tg and dtg techniques. percentage of vinyl alcohol groups in the pvb was determined by a chemical method according to a standard method. some clear and soft film samp...

We studied various electrical and optical properties of Europium (1 atomic %) incorporated BaTiO3 film on n-Si(100) substrate. The thin film structure was analyzed by X-ray diffraction. Film thickness and optical refractive index were measured with an ellipsometer. P-E hysteresis measurement shows the remnant polarization of 37μC/cm in BaTiO3:Eu film. C-V measurements on the pure BaTiO3 film sh...

the improvement of the physical properties of indium tin oxide (ito) layers is quite advantageous in photovoltaic applications. in this study the ito film is deposited by rf sputtering onto p-type crystalline silicon (c-si) with (100) orientation, multicrystalline silicon (mc-si), and glass substrates coated with zno and annealed in vacuum furnace at 400°c. electrical, optical, structural and m...

Optical modeling of iridium thin film erosion under oxygen plasma exposure*" (2004). This work is motivated by interest in use of iridium metal films in the space environment. Optical metrology is a sensitive tool for study of film roughness, optical constants, and microstructural properties. In the present paper, in situ spectroscopic ellipsometry is applied to monitor oxygen plasma etching of...

Gradient Refractive INdex (GRIN) optical components have historically fallen short of theoretical expectations. A recent breakthrough is the manufacturing of nanolayered spherical GRIN (S-GRIN) polymer optical elements, where the constructionmethod yields refractive index gradients that exceed 0.08. Here we report on the application of optical coherence tomography (OCT), includingmicron-class a...

An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse...

The response of radiochromic film, GafChromic EBT, was investigated for dependence on x-ray beam energy using a previously reported real-time optical readout approach. X-ray beams of energy from 75 kVp to 18 MV were employed. The dose-induced change in optical density for the EBT film was compared to values obtained for GafChromic HS and MD-55 films, exposed under the same conditions. All respo...