I should like to bring to the attention of the many readers of the Journal of Research of the National Institute of Standards and Technology the establishment of the Slovak Metrological Society (SMS). SMS came into being on October 16, 1990, as the result of a special founding Congress held in DT Zilina with 137 delegates from the whole of Slovakia in attendance. It brings together individuals ...

The ISO International Vocabulary of Basic and General Terms in Metrology (VIM) represents the international consensus on a common and general terminology of metrology concepts. However, until recently, it was not usual practice in software engineering measurement to take into account metrology concepts and criteria in the design of software measures. Using the ISO 9126-4 Technical Report on the...

1. Foundational metrology and measurement issues 2. Accurate data, total quality systems, kaizen, lean, six sigma 3. Metrology and inspection system services in quality 4. Historical background on metrology 5. Form, fit, finish and function, geometric underpinnings 6. Foundational metrological and measurement issues 7. Basic measurable features in geometric dimensioning 8. Basic principles and ...

The study of surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and each has its own applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology. Strengths and weaknesse...

There is considered some methods of metrology testing of intelligent measurement systems. Also there is shown the necessity of simulation of components of measurement channel for investigation of the intelligent functions of the intelligent measurement systems in the accelerated time scale. Developed the metrology software test of temperature measurement channel using thermocouple. The results ...

Metrology dedicated to electricity and magnetism has changed considerably in recent years. It encompasses almost all modern scientific, industrial, and societal challenges, e.g. the revision of the International System of Units, the profound transformation of industry, changes in energy use and generation, health, and environment, as well as nanotechnologies (including graphene and 2D materials...

A 300 amu closed-ion-source RGA (Leybold-Inficon Transpector 2) sampling gases directly from the reactor of an ULVAC ERA-1000 cluster tool has been used for real time process monitoring of a W CVD process. The process involves H2 reduction of WF6 at a total pressure of 67 Pa (0.5 torr) to produce W films on Si wafers heated at temperatures around 350° C. The normalized RGA signals for the H2 re...

The scanning electron microscope (SEM) has been successfully used as an analysis tool for nano-scale materials in nuclear and special materials applications for many years. Recently, the large chamber (LC) SEM at Y12 has demonstrated its power in surface analysis and inspections of large specimens at the nano-scale without destruction of the specimen. This paper summarizes the research efforts ...