Magnetoelectric material-based cantilever resonators have been considered as a promising solution for magnetic sensing applications. However, most applications focus on bulk piezoelectric (e.g., PZT) laminated composites, which put critical limit miniaturizing into micrometer-sized devices. This work aims at demonstrating the potential of micro-resonator approach with lower power consumption an...

Several types of microfabricated mechanical filters are analyzed for RF communications applications and their advantages over the traditional SAW or FBAR filters are described. GHz frequency operation requires sub-micron dimensions. This work focuses on the modeling of a filter with torsional mode vibration. Ansys finite element simulation has been performed to make comparison with the analytic...

Related Articles Three-dimensional micro electromechanical system piezoelectric ultrasound transducer Appl. Phys. Lett. 101, 253101 (2012) High energy-storage performance in Pb0.91La0.09(Ti0.65Zr0.35)O3 relaxor ferroelectric thin films J. Appl. Phys. 112, 114111 (2012) Intrinsically tunable 0.67BiFeO3-0.33BaTiO3 thin film bulk acoustic wave resonators Appl. Phys. Lett. 101, 232903 (2012) Nonlin...

Abstract This paper presents a new and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems for gas sensing and atomic force microscopy or in any kind of MEMS resonators. Resonant frequencies ranging from 0.8...

Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processing or construction of meta-materials. Light propagation in these structures is modelled by Maxwell’s equations. For a deeper numerical analysis one may compute the scattered field when the structure is illuminated or o...

We show the results obtained from the fabrication and characterisation of MgB2 loops with two nano-bridges as superconducting weak links. These ring structures are made to operate as superconducting quantum interference devices and are investigated as readout system for cryogenics NEMS resonators. The nano-constrictions are fabricated by EBL and ion beam milling. The SQUIDs are characterised at...

In this work, we report a novel method for the dynamical control of the resonant electrical response of terahertz (THz) metamaterials. Our approach is based on planar arrays of split-ring resonators (SRRs) coupled with microfabrication methods to create a bimaterialcantilever-based THz metamaterial switch. Our device exhibits a tunable resonant response centered at 0.75 THz and operates by modi...

A cylindrical metallic plasmonic nano-antenna consisting of a shell supporting a disk, named capped shell, is proposed and studied by frequency domain finite element analysis. This new topology is shown to be weakly dependent on the radius of the structure and is therefore suitable for fabrication by parallel processes such as island lithography which generates a pseudo-random array with a dist...