Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increas...

Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such...

The strain field within automotive roller bearings is intense but small in area (~150-250 um in length.) Dual Ended Tuning Fork (DEFT) resonators fabricated in a Silicon-on-Insulator process are examined as strain sensors for this application using Euler-Bernoulli beam theory. Frequencies of between 990 70and 780 40 kHz were found for .25% strained DEFT’s with strain sensitivities greater than ...

This paper proposes an analysis of two types of Surface Acoustic Wave (SAW) resonators composed of interdigital transducers (IDT) of 200 nm wide on GaN/Si devoted for GHz applications. Two finite element (FEM) models for basic periodic cells are given to demonstrate de characteristics of the resonators at different resonance frequencies. E-beam lithographical techniques have been used for the I...

We propose a setup to observe soliton ratchet effects using discrete cavity solitons in a 1D array of coupled waveguide optical resonators. The net motion of solitons can be generated by an adiabatic shaking of the holding beam with zero average inclination angle. The resulting soliton velocity can be controlled by different parameters of the holding beam.

Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processing or construction of meta-materials. Light propagation in these structures is modelled by Maxwell’s equations. For a deeper numerical analysis one may compute the scattered field when the structure is illuminated or o...

A cylindrical metallic plasmonic nano-antenna consisting of a shell supporting a disk, named capped shell, is proposed and studied by frequency domain finite element analysis. This new topology is shown to be weakly dependent on the radius of the structure and is therefore suitable for fabrication by parallel processes such as island lithography which generates a pseudo-random array with a dist...

The two-dimensional self-consistent time-dependent theory of beam-wave interaction in gyrotron resonators has been modified to account for eccentricity of the annular hollow electron beam. Numerical analysis yields the effect of beam eccentricity on the previously known limiting values of the azimuthal index of the mode, beyond which stationary single-mode operation becomes impossible. c © 2003...

Silicon-based micro- and nano-structures for light management at near-infrared visible frequencies have been widely exploited guided optics metasurfaces. However, emission with this material has hampered by the indirect character of its bandgap. Here it is shown that, via ion beam implantation, emitting G-centers can be directly embedded within Si-based Mie resonators previously obtained solid ...