A mixed-domain schematic representation compatible with nodebased behavioral simulators is developed for rapid design of suspended microelectromechanical systems (MEMS). Hierarchical models of several basic microelectromechanical elements are created. The components are interconnected to represent both devices and more complex systems. Using beams, masses, and electrostatic actuators as the fun...

In recent years, a great deal of attention has been devoted to Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems. The surge of interest was triggered by the pressing need for efficient numerical techniques for simulations of extremely large-scale dynamical systems arising from circuit simulation, structural dynamics, and microelectromechanical systems. In th...

Research and evelopment of microelectromechanical systems (MEMS) has hown a significant promise for a variety of commercial applications. For example, accelerometers are widely used for air bag in automobile, MEMS inkjet print heads re used for printers, gyroscopes for guidance and navigation and pressure sensors for various industrial applications. Some of the MEMS devices have potential to be...

The need to significantly reduce the mass, power, and volume of future scientific spacecraft has resulted in an incrcascd interest on the part of NASA in the relatively new technology of rnicroelectrornechanical systems (IW31S). In addition to being light, compact and low-power-consuming, MEMS technology offers other advantages to space applications. Chief among these are robust performance wit...

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...