we design and simulate a five-port optical router, which is composed of twenty mach-zehnder-based switching elements and twelve waveguide crossings for use in integrated photonic interconnection networks. we simulated and analyzed the operation of the proposed optical router from the aspects of insertion loss, power budget, q-factor and the minimum bit error ratio by use of optisystem simulator...

The role of very low temperature (90-170oC) high density inductively coupled plasma chemical vapor deposition (HDICP CVD) process in RF MEMS switch fabrication is addressed. The results on SiNx layers produced by both HDICP CVD and plasma enhanced CVD (PECVD) are compared in terms of surface roughness, breakdown voltage and RF MEMS switch performance. It is found that HDICP CVD can provide very...

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where mechanical to causes it produce voltage, this voltage is used actuate Micro-Electro-Mechanical-system (MEMS) switch. For first time, we present fabrication process Triboelectric-Nano-Generator (TENG) with technology. The MEMS-TENG has suspended 1.5 mm × pl...

We propose and demonstrate a new fabrication process of a microchannel using the Damascene process. This process aims to integrate photonic circuits with microchannels fabricated in a glass film. The microchannel is fabricated by the removal of the sacrificial layer after a sacrificial layer is formed by the Damascene process and the cover is formed by sputter deposition. A thin cover layer can...

MEMS (Micro-electro-mechanical systems) have shown promise for optical crossconnects in WDM networks. We will describe various MEMS optical-switching technologies, their successes in implementing important optical-networking functionalities, and future perspectives.

The merging of Microelectromechanical (MEM) devices and optics to create Microoptoelectromechanical (MOEM) systems provides opportunity to create new devices and to expand the functionality and applications of MEMS technology. Planar optical waveguide co-integration with surface micromachined (SMM) structures and inclusion of diffractive optical systems within 3-D MEMS chip stack architectures ...

Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophist...