Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan, and James E. Butler of smooth diamond films with uniform thickness and micro/nanostructure over large area substrates (≥150 mm diameter wafer), as recently demonstrated.1 Growth of thin (0.1 to 5 micron thick) diamond films on nondiamond substrates, typically conventional electronic substrates such as Si, SiC, and AlN...

Polymers are used in biological micro-nanoelectromechanical systems BioMEMS/NEMS applications due to their desirable mechanical properties, biocompatibility, and reduced cost relative to silicon microfabrication processes. Understanding the interfacial properties of the films that are used in BioMEMS/NEMS serves as a useful tool in obtaining higher device yield and greater mechanical reliabilit...

We present ultra low-cycle fatigue experiments of axisymmetric nano-crystalline gold films of nano-thickness deformed by a spherical indenter using a recently developed freestanding membrane test. Freestanding membranes of gold were centrally deflected using a spherical indenter attached to a MEMS load cell. Fabrication of the films for these experiments yielded films 100 nm thick and 500 μm in...

The contact phase of an assembly task involving micro and nano objects is complicated by the presence of surface and intermolecular forces such as electrostatic, surface-tension and Van der Waals forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable micro and nanoassemblies with high precision. A detailed model for this electrostat...

Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characteriz...

NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of threedimensional (3-D) fabrication. This paper describes a promising app...

Abstract Nano/NEMS sensors have emerged from MEMS technology. Nano got lot of applications in medical and health care applications. attributes which make them very unique special, such as: small size, low mass, high sensitivity cost production. In this paper we present optimization nano capacitive pressure sensor dimensions for Capacitive are well suited sensing Typically, field involve levels ...