A complete vector-2D micro-integrated sensors system for magnetic field measurement is proposed. The system consists of a micro-integrated Fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is the VITROVAC 6025X deposited over the micro-integrated coils with the RF magnetron sputtering process deposition.

High-quality heteroepitaxial LaNiO3 (LNO) thin films were successfully grown on SrTiO3 (STO) substrates with RF-magnetron sputtering deposition at substrate temperatures in a range 150–650 ◦C. Azimuthal scans around the surface Bragg peak of the film and lattice images from a high-resolution transmission electron microscope (HRTEM) show that a well epitaxial relationship between film and substr...

The process of magnetron sputtering of dielectric zinc oxide (ZnO) films at a constant current source, was studied. It is demonstrated that this method of dielectric films deposition makes it possible to obtain high-quality coatings and layers that meet the requirements for creating multilayer diffractive optical elements.

We describe a sputtering system that can deposit composition spreads in an effectively UHV environment but which does not require the high-throughput paradigm to be compromised by a long pump down each time a target is changed. The system deploys four magnetron sputter guns in a cryoshroud (getter sputtering) which allows elements such as Ti and Zr to be deposited with minimal contamination by ...

Photocatalytic antibacterial sol-gel coated substrates have been reported to kill bacteria under light or in the dark. These coatings showed non-uniform distribution, poor adhesion to the substrate and short effective lifetime as antibacterial surfaces. These serious limitations to the performance/stability retard the potential application of antibacterial films on a wide range of surfaces in h...

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard comb-like consisting several pulses high power. In addition, delay times, statistical times and formative MPPMS discharges, ...

The morphology and grown mechanism of aluminum films from 3nm to 30nm in thickness onto thermal SiO2 on Si(100) substrates have been studied by atomic force microscopy and TCR measurement. The thin films prepared by dc magnetron sputtering at 450°C is composed of islands of aluminum. The island density, distribution of island size, height, and shape are studied.

This paper is a review on the status of hard coating of various physical vapour deposition (PVD) techniques and compare their properties. The use of hard and wear resistant PVD coatings on cutting tools is now widespread in global manufacturing for reducing production cost and improving productivity, all of which are essential if industry is to remain economically competitive. The review includ...

Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source, Thin Solid Films 517 (2009) 6502. spectroscopy of diamond-like carbon films deposited by an anode layer source, Diamond Relat. Mater. 17 DLC films deposited at room-temperature by reactive magnetron sputtering and by an anode layer source – a comparative study, Relation between structural/topol...

We report the experimental observation of room-temperature perpendicular magnetic anisotropy in Ni/Pt multilayers having 7–26 Å Ni and 2.3–4.6 Å Pt layer thicknesses, prepared by dc magnetron sputtering on glass substrates at 7 mTorr Ar sputtering pressure. Perpendicular magnetic anisotropy was found to be sensitively dependent on both Niand Pt-layer thicknesses, and a maximum anisotropy energy...