A CMOS compatible direct write laser lithography technique has been developed for cantilever fabrication on pre-fabricated standard CMOS. We have developed cantilever based sensors for mass measurements in vacuum and air. The cantilever is actuated into lateral vibration by electrostatic excitation and the resonant frequency is detected by capacitive readout. The device is integrated on standar...

We present a new method for the creation of hierarchical structures by two subsequent steps of laser ablation. To create certain functionalization of surfaces hierarchical structures are often required. These structures can be considered as a microstructure with a superposed nanostructure. Therefore the approach presented in this paper divides the patterning process into two parts: The microstr...

Laser microlens array (MLA) lithography was used to fabricate arbitrary periodic array of patterns on photoresist. Reactive ion etching (RIE) was then utilized to etch and transfer the patterns down to the fused silica substrate. By controlling the etching process, the etched surface was 180° out of phase with the unetched surface. Subsequently, the patterns were used as a phase shift mask for ...

We demonstrated an approach to generate microscale branch-like salt crystallization patterns induced by a regular nanopillar array fabricated by using the laser interference lithography system. Branches of the inorganic salt crystals had similar shapes repeating at different sizes, ranging from ~ 1 m to 20 m in width, covering the 2×2 cm 2 area patterned with nanopillars. The angles between t...

We demonstrate that the use of a single SiO2 film, with thickness corresponding to one standing wave (SW) period allows the recording of deep photoresist structures on silicon substrates by laser interference, without use of any additional antireflecting coating. This condition corresponds just to the opposite thickness (half SW period) previously proposed for using the SiO2 films for phase-shi...

The drawing of frequency-path (F-P) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. In this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including ...

We report the optical studies of nanohole arrays in metallic coatings on cleaved optical fibers and also on glass substrates. Nanoholes are produced using electron-beam lithography and range in size from 100 to 700 nm; the pitch is varied from 300 to 3000 nm. Transmission properties are examined using visible 632.8 nm and infrared 1550 nm laser light. The observed interference patterns are dete...

We experimentally observe magnetic resonance in the visible frequency region from self-assembled silver nanocluster metamaterials. Extensive numerical modeling studies were conducted to find the optimal nanocluster dimensions. Self-assembly of silver nanoparticles coated with nanoscale silica coating was then performed on polymer templates fabricated by laser interference lithography. The nanoc...