We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previo...

We present dynamically reconfigurable photonic crystal nanobeam cavities, operating at ~1550 nm, that can be continuously and reversibly tuned over a 9.5 nm wavelength range. The devices are formed by two coupled nanobeam cavities, and the tuning is achieved by varying the lateral gap between the nanobeams. An electrostatic force, obtained by applying bias voltages directly to the nanobeams, is...

In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literatures. This article; for the first time; presents an analytical study on the stiffness variation of m...

The impetus of this study is to investigate the chaotic behavior of a size-dependent nano-beam with double-sided electrostatic actuation, incorporating surface energy effect and intermolecular interactions. The geometrically nonlinear beam model is based on Euler-Bernoulli beam assumption. The influence of the small-scale and the surface energy effect are modeled by implementing the consistent ...

This letter demonstrates the linear dynamic range enhancement of a mode-localized microelectromechanical systems sensor based on two weakly coupled cantilevers under electrostatic actuation resulting in repulsive force. An analytical model is proposed to design sensor, and expression force obtained using finite element simulation. Compared attractive actuation, intensity less sensitive change c...

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in cal...

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbo...