Nitrogen has been successfully incorporated into nanocrystalline diamond films produced by a CH4 /N2 microwave plasma-enhanced chemical vapor deposition method. High mass resolution secondary ion mass spectrometry ~SIMS! characterization shows that the density of the incorporated nitrogen, monitored via CN, can be as high as 10 atoms/cm, depending on the ratio of CH4 to N2 in the reactant gas a...

A method to investigate light and radiation field congruence utilizing a commercially available amorphous silicon electronic portal imaging device (EPID) was developed. This method employed an EPID, the associated EPI software, and a diamond-shaped template. The template was constructed from a block tray in which Sn/Pb wires, 1 mm in diameter, were embedded into a diamond shaped groove milled i...

In this work, techniques to isolate thermophotovoltaic (TPV) devices from the growth substrate and their subsequent integration with Chemical Vapor Deposition (CVD) diamond heat spreaders will be discussed, with the envisioned goal of fabricating thermally managed cells. CVD diamond heat spreaders are a great option for thermal management of TPV cells. The key requirement, however, is the bondi...

The degradation of intrinsic properties of graphene during the transfer process constitutes a major challenge in graphene device fabrication, stimulating the need for direct growth of graphene on dielectric substrates. Previous attempts of metal-induced transformation of diamond and silicon carbide into graphene suffers from metal contamination and inability to scale graphene growth over large ...

With the large differences in surface energy between film and substrate in combination with the low sticking coefficient of hydrocarbon radicals, nanocrystalline diamond growth on foreign substrates typically results in poor nucleation densities. A seeding technique is therefore required to realize pinhole-free and thin coalesced films. In this work, a chemical nucleation method for growth of d...

Nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) and multi-layer-graphene-like hybrid carbon films have been synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) on oxidized silicon which is pre-seeded with diamond nanoparticles. MPECVD of N-UNCD on nanodiamond seeds produces a base layer, from which carbon structures nucleate and grow perpendicularly to form s...

A promising course for large-area ‘quasi’ single-crystal CVD diamond (scCVDD) is the heteroepitaxial growth on the multilayer structure Ir/YSZ/Si(001) [1] as developed at the University of Augsburg on 4inch wafers. Key issue is the similarity of the lattice constants of diamond (dDia = 3.567 Å) and Iridium (dIr = 3.834 Å). Figure 1 shows characterization results of two Diamond-on-Iridium (DoI) ...

X-ray microdiffiaction is a non-destructive technique that allows for depthresolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2x...

The relationships of the residual stress versus process parameters of diamond films grown by Hot Filament CVD were investigated by XRD. The intrinsic macrostress in the diamond films was tensile. The tensile stress decreased almost linearly with acetone concentration, and a minimum tensile stress was obtained at a deposition temperature of 9OOOC and 50 V bias voltage. The microstress in the fil...

The realization of an integrated diamond photonic platform, based on a thin single crystal diamond film on top of a silicon dioxide/silicon substrate, is reported. Using this approach, we demonstrate high-quality factor single crystal diamond race-track resonators, operating at near-infrared wavelengths (1550 nm). The devices are integrated with low-loss diamond waveguides terminated with polym...