The design and analysis of piezoelectric actuators is rarely optimized for low mass applications. However, emerging technologies such as micro air vehicles, and microrobotics in general, demand high force, high displacement, low mass actuators. Utilization of generic piezoceramics and high performance composite materials coupled with intelligent use of geometry and novel driving techniques yiel...

In this paper, a shear force scanning near-field fluorescence microscope combined with a confocal laser microspectrofluorometer is described. The shear force detection is realized based on a bimorph cantilever, which provides a very sensitive, reliable, and easy to use method to control the probe-sample distance during scanning. With the system, high-quality shear force imaging of various sampl...

MEMS are used in acceleration, flow, pressure and force sensing applications on the micro macro levels. The fundamental part of every sensor is transducer which converts measurend intrest into interpretable output signal. most prominent piezoresistive cantilever translates any signal an electrical signal.This paper presents deisgn fabrication U shaped with enhanced sensitivity stiffness gives b...

Abstract Designing optimum energy harvesting devices is the aim of several developments based on numerical or analytical studies different piezoelectric configurations that usually consider constant properties. Experimental tests bending patches showed electrical response depended frequency and amplitude mechanical excitation for displacement-imposed systems. Analytical calculations required ad...

On an AgNO3 crystal, an equilateral or a right-angle triangle-shaped Ag trimer was selectively fabricated through near-field photo-reduction and observed in situ by using an apertured cantilever coupled with an atomic force microscope. By using the different triangle-shaped Ag trimers, irradiation wavelength and polarization dependence of surface-enhanced Raman scattering were investigated.

Valve piezoelectric pumps usually have larger flow rate than that of valveless ones. However, the traditional cantilever valve easily induces stress concentration which impacts the reliability of pumps. Therefore, a cymbal‐shaped slotted check valve is proposed to be applied in a piezoelectric pump in order to reduce the stress concentration of the valve and thus improve the reliability of the ...

This paper presents an analytical, numerical and experimental study of an asymmetric piezoelectric actuator/sensor cantilever beam. The structure consists in a three-layered laminate with a piezoceramic acting as actuator, an elastic material layer and a second piezoceramic layer that can operate as a sensor or actuator. The coupled expansion-bending motion of the system is analytically resolve...

The present study investigates the effects of thermal conduction and convection on self-heating temperatures and bimetallic deflections produced in doped microcantilever sensors. These cantilevers are commonly used as sensors and actuators in microsystems. The cantilever is a monolith, multi-layer structure with a thin U-shaped element inside. The cantilever substrate is made of silicon and sil...

We present in-depth discussion of the design and optimization of a nanomechanical sensor using a silicon cantilever comprising a two-dimensional photonic crystal (PC) nanocavity resonator arranged in a U-shaped silicon PC waveguide. For example, the minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0133%, 0.37 mum, and 0.0625 muN, respectivel...