Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...

Cube-shaped PZT single crystals with PZ/PT=55/45 composition were grown in a relatively uniform size distribution around 80μm by a PbO-flux method. The PZT grains obtained were mixed with liquid polyimide resin and rolled on a glass plate to fabricate 1-3-type composite sheet. This rolling process resulted in a high orientation of the PZT grains as the {h00} are parallel to the substrate plane....

In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is uni...

Ultrasonic motors are expected to be used as microactuators because of their high torque, low speed and simple construction. We have already reported cylindrical-shaped micro ultrasonic motors which utilized a lead zirconate titanate (PZT) thin film. In this paper, we discuss a micro ultrasonic motor composed of bulk PZT. The stator transducer had dimensions of 2.4 mm in diameter and 10 mm leng...

Guided waves generated by Lead Zirconate Titanate (PZT) transducers are often used to detect structural damage for nondestructive evaluation (NDE) and structural health monitoring (SHM) applications. It is generally assumed that the surface-mounted PZT transducers are both undamaged and properly bonded to the host structure during usage. However, this assumption may not be valid, particularly u...

T HE three-dimensional linear theory of elasticity is used to delineate the effect of the thickness, stiffness, and mass density of piezoelectric (PZT) layers on the ® rst ® ve natural frequencies of a simply supported graphite/epoxy laminated plate with PZT layers embedded in it. Platelike smart structures are usually made of PZT patches either embedded in or bonded to the bounding surfaces of...

Ferroe lectri c Pb(Zr,Ti)O, (PZT) thin films ha ve been fa bri cated by the alkoxide based so l-ge l method. PZT stoc k so lutions ha ve been spin coated on glass. sili con and metalli sed sil ico n substrate. The coating is repeated until 0.6 ~lIn thick ness of film has been deposited on various substrates. PZT thin films have been an ne led at vari ous temperatures and characte rized by X-ray...

This paper studies a new nested switching control (NSC) scheme for piezoelectric (PZT) actuators to achieve fast nanopositioning. Conventional PZT controllers typically neglect the actuator saturation nonlinearity for design simplicity but at the cost of reduced performance. By optimizing a quadratic performance cost function that explicitly involves the actuator saturation, the NSC can not onl...

A steel plate bonded with lead zirconate titanate (PZT) actuators was studied on the basis of finite element methods (FEMs). The damping amplitudes of this plate bonded with PZT actuators were obtained at different locations and under different control conditions by analyzing the distribution of the PZT plate’s strain tensor in the first 4 modes. Furthermore, to reduce the unwanted disturbance ...

Two solution-based methods, metallo-organic decomposition and sol–gel processes, were used to study the effects of precursor solution type on the microstructure evolution and texture development of oriented PZT films. Microstructure development and perovskite content are strongly dependent on the heating rate. Fast heating rate forms a dense fine-grained microstructure with (111) orientation. I...