Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonline...

This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. M...

Cost and space constraints are currently driving manufacturers of Mobile Mapping Systems (MMS) and location based services to investigate and develop next generation of low cost and small size navigation systems to meet the fast growing mobile mapping and location services market demands. Advances in Micro-Electro-Mechanical Systems (MEMS) technology have shown promising light towards the devel...

A knowledge-based computer-aided design tool for microelectromechanical systems (MEMS) design synthesis called case-based synthesis of MEMS (CaSyn-MEMS) has been developed. MEMS-based technologies have the potential to revolutionize many consumer products and to create new market opportunities in areas such as biotechnology, aerospace, and data communications. However, the commercialization of ...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...

Modern microwave and millimeter wave phased array antennas are attractive because of their ability to steer wave beams in space without physically moving the antenna element. A typical phased array antenna may have several thousand elements fed by a phase shifter for every antenna, which can steer the resulting array beam to different directions. Their low loss, low cost and lightweight phase s...

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation We also report on the development of a hardware platfor...

The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to pre-fabrication verification of such layouts. In addition, problems related to density control, specific to CMOS-MEMS designs, are discussed. An automatic slotter which introduces MEMS-compatible ...

OBJECTIVES The primary objective of this pilot study was to determine if the Medication Event Monitoring System (MEMS) is capable of providing meaningful estimates of compliance within the indigenous Qatari population. The secondary objective was to highlight any specific problems which might be associated with the use of MEMS within this population. METHOD A sample of adult diabetic Qatari p...

MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly integrated picosats. Very small satellites (1 to 100 kg) stand to benefit the most from MEMS technologies. These small satellites are typically...