The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surfacemicromachined resonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and d...

The micromotor is an extremely small device a few millimetres or less in size. Micromotors in the order of microns are realised by MEMS technology. Important applications in biomedicine include ultrasound probes for blood vessels,1 microrobots for colon intervention,2 smart pills and nanolitre pumps. Other uses include actuators for MOEMS and small variable capacitors. One exciting implication ...

A review is presented of the effect of electrostatic discharge (ESD) on the operation of capacitive microelectromechanical systems (MEMS) structures. Charge injected into the devices can result in failures due to air gap breakdown, stiction, dielectric breakdown and a no operation mode. The dynamic effects of leaky dielectric layers and air gap space charge are also examined.

Compact geared servo drives are a common part of modern industrial automation; thus, their proper modelling is necessary for the application and control design. The presented paper focuses on mathematical model cycloidal gearbox, which used in compact actuator with permanent magnet synchronous motor. A measurement procedure to obtain gearbox parameters along its model. new approach was stiction...