In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

in this study, incorporation of iron ion-doped natrolite nanozeolite, multi-wall carbon nanotubes into chitosan-coated glassy carbon electrode for the simultaneous determination of ascorbic acid, epinephrine, uric acid and tyrosine is studied. the results show that the combination of multi-wall carbon nanotubes and iron ion-doped natrolite zeolite causes a dramatic enhancement in the sensitivit...

electrochemical aptamer-based sensors attract a lot of interest as useful methods because of their low cost, accuracy, sensitivity, and simplicity. an electro-active redox molecule comprises the main part of the electrochemical-based sensors. ferrocene is one of the most popular redox molecule used in biosensor fabrication. but, instability of ferrocenium ion in strong nucleophilic reagents and...

The aim of this study is experimental assay of sensitivity and stability of a bimetallic silver/gold SPR sensor chip. This chip utilizes the sensitivity of the silver and the stability of the gold. Moreover, the Silver layer (instead of usual Cr or Ti layer) was used as an adhesive intermediate layer between the Gold layer and the glass substrate. The optimization of the Gold/Silver thickness u...

Transparent SnO2 thin films were deposited on porcelain substrates using a chemical vapor deposition technique based on the hydrolysis of SnCl4 at elevated temperatures. A reduced pressure self-contained evaporation chamber was designed for the process where the pyrolysis of SnCl4 at the presence of water vapor was carried out. Resistive gas sensors were fabricated by providing ohmic contacts o...

A highly sensitive refractive index sensor based on grating-assisted strip waveguide directional coupler is proposed. The sensor is designed using two coupled asymmetric strip waveguides with a top-loaded grating structure in one of the waveguides. Maximum light couples from one waveguide to the other at the resonance wavelength, and the change in resonance wavelength with the change in refract...

Piezoelectric vibratory tactile sensors are used for measuring the softness and hardness of an object. In this research, the sensitivity of the longitudinal bar type tactile sensor was considered to establish the design guideline of the vibratory tactile sensor. First, the sensitivity on the frequency change of the longitudinal bar resonator in contact with an object was approximately derived f...