نتایج جستجو برای: rapid thermal processing

تعداد نتایج: 990139  

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 1998

Journal: :The Review of scientific instruments 2007
Lucas van Laake Anastasios John Hart Alexander H Slocum

Rapid continuous thermal control of chemical reactions such as those for chemical vapor deposition (CVD) growth of nanotubes and nanowires cannot be studied using traditional reactors such as tube furnaces, which have large thermal masses. We present the design, modeling, and verification of a simple, low-cost reactor based on resistive heating of a suspended silicon platform. This system achie...

2004
Mu Chiao Liwei Lin

This paper presents a post-packaging tuning process for microresonators by PLD (pulsed laser deposition). The microresonators are first hermetically packaged using a RTP (rapid thermal processing) aluminum-to-silicon nitride bonding process. The resonator mass is then altered by adding materials on the surface of the structure using PLD to achieve the desired resonant frequency. The demonstrate...

2014
Jimmy H. Daruwalla Patrick E. Greis Robert Hancock John W. Xerogeanes

Purpose: To determine the rate of RTP following ACL surgery among National Collegiate Athletic Association (NCAA) Division 1 collegiate football athletes and to examine variables that may affect these rates. The hypothesis was that the RTP rate in this cohort will be influenced by factors reflecting skill and accomplishment; that is, athletes higher on the depth chart, those on scholarship, and...

2008
Zhigang Li Weihua Guan Ming Liu Shibing Long Rui Jia Jin Lv Yi Shi Xinwei Zhao

Amorphous silicon film (α-Si) doped with uniform erbium (Er) impurities is deposited by laser ablation technology. High density silicon nanocrystals (nc-Si) can be formed after the rapid thermal annealing (RTA) process. The crystalline process can be explained as the “metal-induced nanocrystalline mechanism”, i.e., doped erbium atoms introduce additional strain in the amorphous silicon matrix a...

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