This paper presents the design and modeling of a flexible tactile sensor, capable of detecting the 2D surface texture image, contact-force estimation and stiffness of the sensed object. The sensor is made of polymer materials. It consists of a cylindrical chamber for pneumatic actuation and a membrane with a mesa structure. The inner radius of the cylindrical chamber is 2cm and its outer radius...

This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring r...

Exhaust gas regulations for motor vehicles are becoming stricter year-after-year, and as internal combustion engines are being made more efficient and their exhaust gas reduced, there is increased demand for pressure sensing in the exhaust systems of diesel engine vehicles. Applying a single-chip semiconductor pressure sensor fabricated by a CMOS process, which has been successfully used for ma...

An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon ...

We experimentally demonstrate a high pressure sensor based on a polarization-maintaining photonic crystal fiber (PMPCF) with Sagnac loop configuration for downhole application. The pressure sensitivity of the proposed sensor is 4.21 nm/MPa and 3.27 nm/MPa at ~1320 nm and ~1550 nm respectively. High pressure measurement up to 20 MPa has been achieved in our experiment. The sensor also shows redu...

Flexible pressure sensors are increasingly being used in medical and non-medical applications, and particularly in innovative health monitoring. Their efficacy in medical applications such as compression therapy depends on the accuracy and repeatability of their output, which in turn depend on factors such as sensor type, shape, pressure range, and conformability of the sensor to the body surfa...

(Abstract) Pressure measurements are required in various industrial applications, including extremely harsh environments such as turbine engines, power plants and material-processing systems. Conventional sensors are often difficult to apply due to the high temperatures, highly corrosive agents or electromagnetic interference (EMI) noise that may be present in those environments. Fiber optic pr...

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a smal...

AIMS To demonstrate that a sensor, which is inserted through the sclera and placed in intimate contact with the choroid, can reliably detect changes in the intraocular pressure (IOP). METHODS A manometer was used to control the IOP of three cadaver eyes in steps of 7 mm Hg. A piezoresistive pressure sensor was used to measure the pressure at the choroid through a 2.5 mm diameter hole that was...