In this paper, we report the γ-ray sterilization effects in pH-sensitive polysilicon wire (PSW) sensors using a mixture of 3-aminopropyltriethoxysilane (γ-APTES) and polydimethylsiloxane (PDMS)-treated hydrophobic fumed silica nanoparticles (NPs) as a sensing membrane. pH analyses showed that the γ-ray irradiation-induced sensitivity degradation of the PSW pH sensor covered with γ-APTES/silica ...

A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the effect of the parasitic capacitance ass...

Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels. The principle of the thermal conductivity detector has been extended for measuring both the thermal conductivity and the thermal capacity of biofuel in the range between 1 to 100 Hz, using an AC-operated polysilicon heater for injecting a sinusoidal h...

This report investigates the sensing characteristics of polysilicon wire (PSW) glucose biosensors, including thickness characteristics and line-width effects on detection limits, linear range and interference immunity with membranes coated by micropipette/spin-coating and focus-ion-beam (FIB) processed capillary atomic-force-microscopy (C-AFM) tip scan/coating methods. The PSW surface was modif...

Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ...

Polysilicon Thin Film Transistors (TFT) are of great interest in the field of large area microelectronics, especially because of their application as active elements in Flat Panel Displays. Different deposition techniques are in tough competition with the objective to obtain device-quality polysilicon thin films at low temperature. In this paper we present the preliminary results obtained with ...

We have developed a novel wafer-scale single-crystalline silicon micromirror bonding process to fabricate optically flat micromirrors on polysilicon surface-micromachined 2D scanners. The electrostatically actuated 2D scanner has a mirror area of 450 jtm x 450 tm and an optical scan angle of Compared to micromirrors made with a standard polysilicon surface-micromachining process, the radius of ...