This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it wit...

the nonlocal nonlinear buckling of a double layer graphene sheet (dlgs) covered by zinc oxide (zno) piezoelectric layers is investigated in this study. the surrounding circumstances of the system are considered as a pasternak foundation including spring constants and a shear layer. graphene sheets are subjected to longitudinal magnetic field and biaxial forces. on the other hand, the zno piezoe...

This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a micro combustor, a turbine and a centrifugal compressor. Comprehensive simulation has been implemented to optimal the component design. We have successfully demonstrated a silicon-based micro combustor, which consist...

In this paper, trends from the last 10 years of inertial micro-generator literature are investigated and it is shown that, although current generator designs are still operating well below their maximum power, there has been a significant improvement with time. Whilst no clear conclusions could be drawn from reported fabricated devices with respect to preferred transducer technology, this paper...

An array of piezoelectric micro actuators can be used for radiation of an ultrasonic carrier signal modulated in amplitude with an acoustic signal, which yields audio frequency applications as the air acts as a self-demodulating medium. This application is known as the parametric array. We propose a parametric array with array elements based on existing piezoelectric micro ultrasonic transducer...

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared. This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers, acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors, in-situ temperature sensors, in-situ stresshtrain...

1 . I N T R O D U C T I O N Microrobotics researches require to operate on autonomous devices with simple design and limited costs and energy consumption, even if this fact limits the possible tasks of each single robot. In the last few years the interest in micro mechatronic systems is increasing and several different kind of microrobots have been designed [1], [2],[3]. Applications of these r...

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflections has been studied as a function of membrane thickness and d.c. bias. The total stress in the films and the piezoelectric constant, d31, have...