A nanolaboratory—a prototype nanomanufacturing system—is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-offreedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a r...

Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonr...

The outcome of a self-assembly process is not only determined by the specified connections between building blocks, but also by the means of bringing building blocks into contact and of testing for the formation of an intended connection. Endowing each building block with the ability to actively move overcomes some limitations of diffusion-driven molecular and nanoscale self-assembly by acceler...

Introduction Quantum Engineering refers to techniques and methods utilized for the efficient manipulation of atoms and molecules for practical purposes. The manipulation and control of isolated single neutral atoms and their interactions has been a long term goal with important practical applications in many areas of interest in nanotechnology, communications, quantum engineering, fundamental p...

In-depth understanding of the kinetics of the vapor deposition process is substantial for advancing this capable bottom-up nanostructure synthesis approach into a versatile large-scale nanomanufacturing technology. In this paper, we report a systematic study of the vapor deposition kinetics of ZnO nanomaterials under controlled atmosphere and properly refined deposition conditions. The experime...