Due to their fast response, high accuracy and non-friction force, piezo-actuators have been widely employed in multiple degree-of-freedom (DOF) stages for various nano-positioning applications. The use of flexible hinges in these piezo-actuator-driven stages allows the elimination of the influence of friction and backlash clearance, as observed in other configurations; meanwhile it also causes ...

This paper presents an experimental study of laser interferometry-based closed-loop motion tracking for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry-based motion tracking control is established with experimental facility. The authors present and discuss open-loop control, model-based closed-loop control, and robust motio...

The objective of current paper is 3D simulation of turbulent, developing flow and unsteady within a circular duct in presence of the body force vector persuaded by Dielectric barrier discharge (DBD) plasma actuator inside the surface of geometry for the first time. This article aims at investigating of applying plasma actuator to control separation with special arrangement of electrodes. For th...

A superscalar microcontroller based system is used to control the Physik Instrumente (PI) piezo-electric ultrasonic nano-positioning (PUN) stage for a micro-factory has been proposed by the author. A Linux based development board i.e. BeagleBone containing TI AM3358/9 SoC based on an ARM Cortex-A8 processor core, is suggested to provide visual servo control to the nano-positioning stage. The st...

We have developed a hygromorphic metal oxide actuator using an electrochemical method to produce a superhydrophilic freestanding nano-capillary forest of titanium oxide with a high aspect ratio (~80). This metal oxide film has an inhomogeneous initial gap at the top and bottom surfaces between the tubes due to flexure during fabrication. The actuation mechanism is as follows. First, when a drop...