micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created ...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...

INTRODUCTION Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many micro/nano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a syst...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

In this study, a semi analytical method for transverse and axial vibration of single-walled boron nitride nanotube (SWBNNT) under moving a nanoparticle is presented. The surrounding elastic medium as Pasternak foundation and surface stress effect are included in the formulations of the proposed model. Using Timoshenko beam theory (TBT), Hamilton’s principle and nonlocal piezoelasticity theory, ...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Electro-thermal actuation mechanism continues to attract attention of MEMS designers as a reliable method of delivering high displacements and high actuation forces [1]. The main purpose of this work is to conduct a coupled multi-physics FEA of a micro-machined electro-thermomechanical actuator (μETMA) in order to determine a nature of a common failure mode, suggest a better fabrication process...

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...