A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...

Glassy and elastomeric nematic networks with dye molecules present can be very responsive to illumination, huge reversible strains being possible. If absorption is appreciable, strain decreases with depth into a cantilever, leading to bend that is the basis of micro-opto-mechanical systems (MOMS). Bend actually occurs even when Beer's law suggests a tiny penetration of light into a heavily dye-...

We present a mathematical model for the dynamics of an electrostatically actuated micro-cantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular, illustrate that parametric r...

The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced ch...

A new micro-XRF instrument was developed in combination with an atomic force microscope (AFM). A small pinhole of 5 or 10 μm was made on the AFM cantilever. The center of the micro X-ray beam generated by a polycapillary X-ray lens was passed through the pinhole. The present experiment demonstrated that the size of the original X-ray beam of 48 μm produced by the polycapillary lens was reduced ...