 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

Next-generation wavelength routing optical networks requiring optical cross connects (OXC) in the network have the ability to direct optical signals from any input interface to suitable output interfaces by configuring their internal embedded optical switch matrices. Microelectromechanical systems (MEMS) switches are regarded as the most promising technology to achieve such functionality. We co...

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

In this paper, a frequency reconfigurable active array antenna (RAA) system, which can be reconfigurable at three different frequency bands, is proposed. The proposed RAA system is designed with a novel frequency reconfigurable front-end amplifiers (RFA) with the simple reconfigurable impedance matching circuits (RMC) with the MEMS switches. With the MEMS switch, the RFA is realized without any...

The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and...

We report on a 32 × silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The is fabricated 200-mm silicon-on-insulator wafers in commercial complementary metal-oxide-semiconductor (CMOS) foundry. device has maximum on-chip loss of 7.7 dB and an extinction ratio 50.8 dB. switching voltage 9.45 V the 20-dB bandwidth 28.7 nm. Our work shows promi...

Introduction: Multi-throw switches are widely used in microwave circuits for switch matrices and true-time-delay phase shifting applications. Traditionally, the multi-throw switch uses GaAs MESFETs and pin diodes to perform its switching function. It exhibits good performances at low frequencies, but deteriorates in the high frequency range beyond 1 GHz [1]. On the other hand, the monolithic mi...

this paper addresses the problem of the fractional sliding mode control (fsmc) for a mems optical switch. the proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. after a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for lar...