Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

Abstract Aiming for on-line monitoring of typical mechanical faults transformer, a two-channel MEMS digital silicon wheat voice print detection system is developed, which consists two channel array, the host sound acquisition and upper computer software with function displaying real-time waveform spectrum analysis. The device can operate reliably in complex environments by adjusting array spaci...

Cough is a protective mechanism of the proximal respiratory tract. The frequency and severity cough provide useful information for diagnosis upper diseases evaluation their treatments. Manual classification subjective, labor-intensive, time-consuming. In this study, technique based on microelectromechanical system microphone proposed. For process, various tabular time-series machine learning al...

We show that the MEMS gyroscopes found on modern smart phones are sufficiently sensitive to measure acoustic signals in the vicinity of the phone. The resulting signals contain only very low-frequency information (<200Hz). Nevertheless we show, using signal processing and machine learning, that this information is sufficient to identify speaker information and even parse speech. Since iOS and A...

Acoustics and vibrations caused on machine structures can result in faulty or collapse of the whole mechanical system. These acoustics produced by machinery are vital indicators of machine health. Acoustic signals analysis can be used as a tool for locating the problem and thus taking necessary actions. MEMS sensors provide high accurate low size and low cost microphones which can be even used ...

This paper presents a comprehensive literature survey of MEMS based piezoelectric microphones along with the fabrication processes involved, application domains, and methodologies used for experimentations. Advantages limitations existing are presented impact process parameters during thin film growth. review identifies issues faced by microphone technologies spanning from invention to most rec...

Preparing and pre-testing experimental setups for flight tests is a lengthy but necessary task. One part of this preparation comparing newly available measurement technology with proven setups. In our case, we wanted to compare acoustic Micro-Electro-Mechanical Systems (MEMS) large surface-mounted condenser microphones. The task started the comparison spectra in low-speed wind tunnel environmen...