Measurements are crucial for research in the fields of microelectromechanical (MEMS), nanoelectromechanical (NEMS) and industrial applications. In this work, design approach development construction a testing 4D mechatronic system, respective validation, including detailed description used components parts as well performed tests validation working environment, presented. Because is equipment, ...

Nanoelectromechanical systems (NEMSs) are systems with characteristic dimensions of a few nanometers. By exploiting nanoscale effects, NEMSs present interesting and unique characteristics, which deviate greatly from their predecessor microelectromechanical systems (MEMSs). For instance, NEMSbased devices can have fundamental frequencies in the microwave range (B100GH) (Rueckes et al. 2000); mec...

We study phonon-mediated dissipation mechanisms in small-scale mechanical systems in light of recent efforts to design high-Q micrometerand nanometer-scale electro-mechanical systems (MEMS and NEMS). We consider dissipation mechanisms which redistribute the energy within a resonator, such as thermoelastic damping, the Akhiezer effect, and the Landau–Rumer effect, as well as the radiation of ene...

We perform a theoretical analysis of a setup intended to measure the repulsive (outward) Casimir forces predicted to exist inside of perfectly conducting rectangular cavities. We consider the roles of the conductivity of the real metals, of the temperature and surface roughness. The possible use of this repulsive force to reduce friction and wear in micro and nanoelectromechanical systems (MEMS...

Incorporation of microelectromechanical system (MEMS) oscillators into devices has been limited by the lack of an easily-integrated motional detection scheme. A capacitive detection scheme enabled by impedance matching techniques has been demonstrated for nanowires. However, no measurement had been demonstrated in micron-scale oscillators of interest in sensor and electrical filter applications...

A brief description of the stability problem in micro and nano electromechanical devices (MEMS/NEMS) actuated by Casimir forces is given. To enhance the stability, we propose the use of curved surfaces and recalculate the stability conditions by means of the proximity force approximation. The use of curved surfaces changes the bifurcation point, and the radius of curvature becomes a control par...

We review concurrent multiscale simulations of dynamic and temperature-dependent processes found in nanomechanical systems coupled to larger scale surroundings. We focus on the behavior of sub-micron MicroElectro-Mechanical Systems (MEMS), especially microresonators. These systems are often called NEMS, for Nano-Electro-Mechanical Systems. The coupling of length scales methodology we have devel...