We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100 μWRMS of (root-mean-square) output electric power under 0.03 GRMS (G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by...
