the drawing of frequency-path (f-p) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. in this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including conventional and modified two- and three-longitudinal-mode laser interferometers....

This contribution provides an analysis of progress in the field of quantum lithography. We review the conceptual foundations of this idea and the status of research aimed at implementing this idea in the laboratory. The selection of a highly sensitive recording material that functions by means of multiphoton absorption seems crucial to the success of the proposal of quantum lithography. This re...

We have developed a multilevel interference lithography process to fabricate 50 nm period gratings using light with a 351.1 nm wavelength. In this process multiple grating levels patterned by interference lithography are overlaid and spatial-phase aligned to a common reference grating using interferometry. Each grating level is patterned with offset phase shifts and etched into a single layer t...

The authors report demonstration of a low-cost 1000 USD interference lithography system based on a Lloyd’s mirror interferometer that is capable of 300 nm pitch patterning. The components include only a 405 nm GaN diode-laser module, a machinist’s block, a chrome-coated silicon mirror, substrate, and double-sided carbon scanning electron microscopy SEM tape. The laser and the machinist’s block ...

Metallic woodpile photonic crystals and metamaterials operating across the visible spectrum are extremely difficult to construct over large areas, because of the intricate three-dimensional nanostructures and sub-50 nm features demanded. Previous routes use electron-beam lithography or direct laser writing but widespread application is restricted by their expense and low throughput. Scalable ap...

In a ring laser gyroscope, due to the rotation and the Sagnac effect, a phase difference between the two counter-propagating beams is generated. In this device, the higher phase difference between these two beams causes the better the interference pattern detection, and thus the sensitivity is increased. In this paper, the effect of inserting a dielectric-graphene photonic crystal inside a ring...