High-resolution noncontact atomic force microscopy in UHV has been used for characterization of KBr 001 surface morphology development due to an oblique incidence of low-energy ion beams 4 keV He+ and Ar+ at 75° . We have found several features of the process directly related to the ionic nature of halide surfaces, such as formation of two-dimensional 2D pits and rectangular 2D epitaxial adisla...