A highly versatile soft gripper that can handle an unprecedented range of object types is developed based on a new design of dielectric elastomer actuators employing an interdigitated electrode geometry, simultaneously maximizing both electroadhesion and electrostatic actuation while incorporating self-sensing. The multifunctionality of the actuator leads to a highly integrated, lightweight, fa...

In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about 2 volt and the size of the switch is 110×60μm, that in compared with other electrostatic cantilever be...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

In this paper, the dynamic response of resonating nano-beams is investigated using a strain gradient elasticity theory. A nonlinear model is obtained based on the Galerkin decomposition method to find the dynamic response of the investigated beam around its statically deflected position. The mid-plane stretching, axial residual stress and nonlinear interaction due to the electrostatic force on ...

Feedback-based control techniques are useful tools in precision measurements as they allow us to actively shape the mechanical response of high quality factor oscillators used force detection measurements. In this paper, we implement a feedback technique on high-stress low-loss SiN membrane resonator, exploiting charges trapped dielectric membrane. A properly delayed (dissipative feedback) enab...

Electrostatic actuation is a promising approach to compensate for misalignment of bonded, multi-layered microsystem devices. The present work discusses the performance of electrostatic actuators used for in-plane misalignment compensation in an atom chip comprising an optical cavity. Experimental investigation revealed that the central frame suspending the mirrors can be moved between 3-5 m in ...

A two degree-of-freedom microrobot is designed in the Berkeley 3-layer SOI/DRIE process. The microrobot uses electrostatic actuation to minimize power consumption. To create out-of-plane motion, which translates to lateral movement for the robot, a variation on a torsional resonator is used. For inplane motion, the microrobot uses a simple electrostatic gap-closing actuator to pivot the microro...

There have been growing interests in direct patterning of metallic contents on the surface of the substrate without including complex steps of the micro fabrication lithography process. The direct fabrication process using ink-jet printing can be expected to be a powerful tool for both nanotechnology research and applications such as micro electronics. Inkjet printers operate by propelling vari...

This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in micro...