Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors. Currently FEBID is, however, limited in resolution due to deposition outside the area of the primary electron beam and in metal purity due to...

Nanostructured SnO2 thin films were prepared using Electron Beam-Physical Vapor Deposition (EB-PVD) technique. Then Ag nanoparticles synthesized by laser-pulsed ablation were sprayed on the films. In order to form a homogenous coated of SnO2 on the glass surface, it was thermally treated at 500°C for 1 h. At this stage, the combined layer on the substrate was completely dried for 8 h in the air...

We present a straightforward low cost liquid phase deposition method to coat arbitrary-shaped dielectric substrates with uniform electron beam sensitive polymer films. Furthermore, we investigate the use of electron beam lithography to pattern the coated pre-form substrates. The polymers studied are poly-methyl-methacrylate with different molecular weights, poly(methyl methacrylate-co-ethyl acr...

Arresting effects of nanocurvature and electron beam-induced athermal activation on the structure changes at nanoscale of free-ended amorphous SiOx nanowire were demonstrated. It was observed that under in situ uniform electron beam irradiation in transmission electron microscope, the near surface atoms at the most curved free end of the nanowire preferentially vaporized or diffused to the less...

Bimetallic islands films consisting of composite Au-Ag nanoparticles are deposited on glass substrates by electron beam evaporation. Broad tuning of the surface plasmon resonance (SPR) characteristics can be achieved by controlling film composition, deposition temperature and post-deposition thermal annealing. Optical and structural characterization of the samples enable to establish the link b...

Abstract We discuss how the emission of electrons and ions during electron-beam-induced physical vapor deposition can cause problems in micro- nanofabrication processes. After giving a short overview different types radiation emitted from an electron-beam (e-beam) evaporator amount depends on parameters conditions, we highlight two phenomena more detail: First, unintentional shadow evaporation ...

Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)4 by using the available cross sections for electronic excitation and ...